Resolution: 1nm for lateral resolution, lower than 1nm for vertical resolution
Maximum spanning range: 3200 nm* 3200 nm
Image output in general format such as Bmp, Jpeg, etc.
Be able to scan in X and Y direction and quantify the scanning speed.
Be able to set the scanning frequency and automatically control the cease of the scanning process.
Be able to measure the nanometer scale roughness of samples.